Thin Film Processes

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Engineering
Thin Film Processes

Thin Film Processes

Name: Thin Film Processes
ISBN: 9780127282503

John L. Vossen (Auth.)

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Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process

Catégories:

Engineering

Année:

1978

Editeur::

Academic Press

Langue:

english

Pages:

553

ISBN 10:

0127282505